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Hitachi

SU8600

Metrology & InspectionHitachi SU8600 family
Research Quality: 20% complete
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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)
  • Plate 01Introducing the Hitachi CFE - SEM SU8600

    Hitachi High-Tech GlobalTVWatch on YouTube
  • Plate 02Hitachi High-Tech Europe | Introducing the Hitachi CFE-SEM SU8600

    Hitachi High-Tech GlobalTVWatch on YouTube

What is it?

The sources identify the Hitachi SU8600 as a field emission SEM in the COSINC characterization facility. It is described as having a cold field emission gun for high-brightness, high-resolution imaging, two secondary electron detectors, and magnification up to 2,000,000×.

What do the numbers mean?

Optics & imaging3

Imaging description
High-brightness, high-resolution imaging[1]
Accurate?
Magnification
Up to 2,000,000×[1]
Accurate?
Detectors
Two secondary electron detectors[1]
Accurate?

Configuration & options2

Instrument type
Field emission SEM[1]
Accurate?
Beam source
Cold field emission gun[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SU8600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU8600 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SU8600 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SU8600 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SU8600 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SU8600 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]colorado.educolorado.educolorado.edu
  2. [2]Resource Scheduler & Rates | Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) | University of Colorado Bouldercolorado.educolorado.edu
  3. [3]Resource Scheduler & Rates | Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) | University of Colorado Bouldercolorado.educolorado.edu
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Last updated Jul 29, 2026.

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