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JEOL

JSM-7500F

Metrology & InspectionJEOL JSM-7500F family
Research Quality: 40% complete
JSM-7500F — nano.upenn.edu
Fig. 01JSM-7500Fnano.upenn.edu[1]

What is it?

The JEOL 7500F HRSEM is described as a dedicated conventional and high-resolution imaging microscope. It provides ultrahigh resolution of 0.8 nm at 30 kV and 1 nm at 1 kV, and includes multiple detectors and imaging modes for studying a wide range of solid materials. The source also notes secondary and backscattered electron detectors, a scanning-transmission electron detector, gentle-beam mode, and an EDAX energy dispersive x-ray spectrometer for chemical characterization.

What can it run?

Process applications and technology nodes documented for this tool.

  • High-resolution imaging
  • Conventional imaging
  • Study of a wide range of solid materials
  • Soft-matter studies
  • Imaging of soft or insulating samples
  • Chemical characterization via spectra or element maps

What do the numbers mean?

Gas & chemistry1

Chemical characterization
EDAX Energy Dispersive x-ray spectrometer (EDS) available for spectra or element maps[1]
Accurate?

Optics & imaging3

Resolution at 30 kV
0.8 nm[1]
Accurate?
Resolution at 1 kV
1 nm[1]
Accurate?
Detectors
Secondary electron, backscattered electron, and scanning-transmission electron detectors[1]
Accurate?

Configuration & options3

Instrument type
Scanning Electron Microscope (SEM)[1]
Accurate?
Model designation
JEOL 7500F HRSEM[1]
Accurate?
Imaging mode
Gentle-beam mode via stage biasing system[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Chemical characterizationEDAX Energy Dispersive x-ray spectrometer (EDS) available for spectra or element maps[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the JSM-7500F are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the JSM-7500F are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the JSM-7500F are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the JSM-7500F are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the JSM-7500F are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the JSM-7500F is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]nano.upenn.edunano.upenn.edunano.upenn.edu
  2. [2]扫描电子显微镜 (SEM) | 产品 | JEOL 日本电子株式会社jeol.co.jp (Mar 19, 2017)web.archive.org
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Last updated Jul 29, 2026.

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