Keysight
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The Keysight 4072 A Parametric is a parametric tester. The Keysight 4072 A Parametric is specified for 8-inch wafers.[1][2]
The 4072 A supports up to two high-power SMUs (HPSMU), up to two high-resolution SMUs (HRSMU), and up to eight total SMUs.[2]
The system includes a low-leakage switching matrix configurable from twelve to forty-eight fully-guarded Kelvin outputs, and a high-frequency switching matrix with integrated pulse generator control.[2]
Parametric testers are used in semiconductor manufacturing to perform electrical testing on test structures embedded in the wafer scribe lines, providing data on process parameters after front-end-of-line (FEOL) or back-end-of-line (BEOL) processing.
The 4072 A performs direct-current (DC) measurements, capacitance measurements, flash memory cell testing, and testing of other high-frequency applications.[2]
Measurement capabilities of the 4072 A include two microvolt and one femtoamp resolution on the HRSMU, plus-minus two hundred volts and plus-minus one amp output on the HPSMU, and a one kilohertz to two megahertz capacitance frequency measurement range on the HSCMU.[2]
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Typical measurements include current-voltage behavior, leakage, resistance-related checks, continuity, isolation, capacitance-related characterization, and other electrical tests used to evaluate semiconductor structures and materials.
Parametric testing focuses on fundamental electrical characteristics of structures and devices at the wafer level. Final functional test is concerned with whether a completed part performs its intended circuit functions after later manufacturing stages.
The following facts about the 4072 A Parametric are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4072 A Parametric are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 4072 A Parametric are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 4072 A Parametric are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 4072 A Parametric are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 4072 A Parametric is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 20, 2026.
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