KLA Surfscan

Models in this family

1. 

   Surfscan 5500 Particle Defect

   The KLA Surfscan 5500 is a particle defect detection system for semiconductor wafers.

2. 

   Surfscan 6100 Wafer

   The KLA Surfscan 6100 is a wafer inspection system that uses a 632 nm HeNe red laser to detect particles down to 0.16 micron on bare silicon.

3. 

   Surfscan 7600 Particle Defect
4. 

   Surfscan 7700 Particle Defect

   The KLA Surfscan 7700 is a particle defect inspection system.

5. 

   Surfscan AIT 8010 Particle Defect

   The KLA Surfscan AIT 8010 Particle Defect System is a particle defect inspection system with software version 3.3.2.813 and SECS/GEM CIM.

6. Surfscan SP 1

   The KLA Surfscan SP 1 is a wafer inspection tool from KLA-Tencor used for defect detection and surface quality inspection on polished wafers, epi wafers, and engineered substrates.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Surfscan SP 1 TBi	—	—	—	Equipment inventory listing[1]

7. 

   Surfscan SP 1 Classic

   KLA Surfscan SP 1 Classic is a KLA tool configured for a wafer centering device.

8. 

   Surfscan SP 1 Classic Centering Ring

   The KLA Surfscan SP 1 Classic Centering Ring is a metrology and inspection item associated with the Surfscan SP 1 Classic model.

9. 

   Surfscan SP 1 Classic Particle Defect

   The KLA Surfscan SP 1 Classic Particle Defect System is a particle defect inspection system for 6-inch and 8-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Surfscan SP1	KLA Surfscan	—	—	waferpedia.com[2]

10. 

    Surfscan SP 1 DLS

    The KLA Surfscan SP1 DLS is an unpatterned surface inspection system for defect detection on polished wafers, epi wafers, and engineered substrates.

11. 

    Surfscan SP 1 DLS Centering Ring

    The KLA Surfscan SP 1 DLS Centering Ring is a KLA component for the Surfscan SP 1 DLS unpatterned surface inspection system.

12. 

    Surfscan SP 1 DLS Particle Defect

    The KLA Surfscan SP 1 DLS Particle Defect System is a wafer inspection tool cited in sources with 8-inch, 12-inch, and 300mm configurations.

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Surfscan SP 1 DLS Particle Defect System, 12 inch	—	2002	Listed as a 12-inch configuration with FOUP handler; one source describes it as non-operational, another notes Windows NT, two loadports, and input current details.	Equipment inventory listing[3]
    Surfscan SP 1 DLS Particle Defect System, 8 inch	—	2009	Listed as an 8-inch configuration with a single-station FOUP handler and missing analog boards x2 and DC distribution board.	Equipment inventory listing[4]

13. 

    Surfscan SP 1 Particle Defect

    The KLA Surfscan SP 1 is a particle defect system used for detecting defects on semiconductor wafers, with support for wafers up to 12 inches in diameter.

14. 

    Surfscan SP 1 TBI

    KLA Surfscan SP 1 TBI is an unpatterned wafer inspection system with triple-beam illumination and brightfield capability.

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Surfscan SP1	—	—	SP1 is an unpatterned wafer inspection system with proprietary Stationary Beam Technology and an optional brightfield channel based on Nomarski differential interference contrast technology.	web.archive.org[5]

15. 

    Surfscan SP 1 TBI Centering Ring
16. Surfscan SP 1 TBI Exchange

    The KLA Surfscan SP 1 TBI Exchange is a particle inspecting tool in the Surfscan family.

17. 

    Surfscan SP 1 TBI Keyboard

    The KLA Surfscan SP 1 TBI Keyboard is a keyboard-only replacement part for the KLA Surfscan SP 1 TBI system.

18. 

    Surfscan SP 1 TBI Particle Defect

    The KLA Surfscan SP 1 TBI is a particle defect system for wafer inspection, with configurations supporting 8-inch and 12-inch wafers.

19. 

    Surfscan SP 1 TBI Particle Measurement

    The KLA Surfscan SP 1 TBI is a particle measurement tool for 8-inch wafers.

20. 

    Surfscan SP 2

    The KLA Surfscan SP 2 is a surface inspection tool in the metrology and inspection class. Machines of this class are used to detect and map particles and other surface defects on semiconductor wafers and related substrates.

21. 

    Surfscan SP 2 Particle Defect

    The KLA Surfscan SP 2 is a particle defect inspection system for semiconductor wafers.

22. 

    Surfscan SP 3 Particle Defectproduced 2011–

    The KLA Surfscan SP 3 Particle Defect System is a bare wafer inspection station for 12-inch wafers with DUV illumination.

23. Surfscan SP 5 Particle Defect

    The KLA Surfscan SP 5 Particle Defect System is a bare wafer inspection station configured for 12-inch wafers.

Sources