Waferpedia

KLA

Surfscan SP 1 Classic

For Wafer Centering DeviceKLA Surfscan family
Research Quality: 40% complete
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Surfscan SP 1 Classic — Inventory photo
Fig. 01Surfscan SP 1 ClassicInventory photo[1]

How it works

The KLA Surfscan SP 1 Classic has an upgraded or new Y-Axis linear bearings configuration for the wafer centering device.[1]

What do the numbers mean?

Wafer handling2

Wafer size
For Wafer Centering Device[2]
Accurate?
Description
Upgraded/New - Y-Axis Linear Bearings (Only) - For Wafer Centering Device[1]
Accurate?

Configuration & options4

Upgraded/New[1]
Accurate?
Y-Axis Linear Bearings (Only)[1]
Accurate?
OEM
KLA[2]
Accurate?
Model
Surfscan SP 1 Classic[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Who made the Surfscan SP 1 Classic?

The Surfscan SP 1 Classic was made by KLA.[3][1][2]

Not publicly documented

The following facts about the Surfscan SP 1 Classic are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 Classic are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Surfscan SP 1 Classic are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Surfscan SP 1 Classic are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Surfscan SP 1 Classic are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Surfscan SP 1 Classic is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
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Last updated Oct 20, 2026.

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