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KLA

Visedge CV 300 Edge Defect

Metrology & Inspection
Research Quality: 30% complete

Provisional entry — research in progress

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KLAVisedge CV 300 Edge Defect
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What it is

The KLA Visedge CV 300 is an edge-defect inspection system for semiconductor wafers. The KLA Visedge CV 300 supports 300 mm (12 inch) wafers. The KLA Visedge CV 300 system includes a main body and an equipment front end module.[2][1]

How it works

The KLA Visedge CV 300 main body houses a monitor, keyboard, trackball mouse, a CANDELA (ADC MUX) unit, a system computer, a pneumatic module, a motion control unit, a system power box, and a 12 inch stage unit. The equipment front end module of the KLA Visedge CV 300 provides two load ports, a robot assembly, and a prealigner. The KLA Visedge CV 300 also includes an interlock controller in the front end module.[1]

Where it fits in the process flow

General reference — not yet source-verified

Edge integrity is critical in wafer-level packaging, where individual die are handled while still attached to the wafer. Edge inspection is also used before dicing to catch cracks that could destroy die during separation.

Applications

The KLA Visedge CV 300 is used for wafer edge defect detection.[2]

What do the numbers mean?

Wafer handling2

Wafer Size
300mm[1]
Accurate?
Robot
YASKAWA XU-RCM 9206[1]
Accurate?

Configuration & options3

Stage Size
12 inch[1]
Accurate?
Vintage
June 2007[1]
Accurate?
CANDELA
ADC MUX[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What components are in the KLA Visedge CV 300 main body?

The main body of the KLA Visedge CV 300 includes a monitor, keyboard, trackball mouse, a CANDELA (ADC MUX) unit, a system computer, a pneumatic module, a motion control unit, a system power box, and a 12 inch stage unit.[1]

Not publicly documented

The following facts about the Visedge CV 300 Edge Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Visedge CV 300 Edge Defect are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Visedge CV 300 Edge Defect are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Visedge CV 300 Edge Defect are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Visedge CV 300 Edge Defect are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Visedge CV 300 Edge Defect is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]limitekltd.comlimitekltd.comlimitekltd.com
  2. [2]Equipment inventory listing
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Last updated Aug 20, 2026.

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