Lam Research
2300 e 5 Kiyo EXP Polysilicon
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam 2300 e 5 Kiyo EXP Polysilicon Etch is a 12-inch wafer etch system from Lam Research. The tool is designed for polysilicon etching in semiconductor manufacturing.[1]
What it is
The Lam Research 2300 e 5 Kiyo EXP is a polysilicon etch system designed for 12-inch wafers.[1]
How it works
General reference — not yet source-verifiedEtch chemistry for polysilicon in this tool class generally involves chlorine-based gases, often with oxygen or other additives for profile control.
Where it fits in the process flow
General reference — not yet source-verifiedPolysilicon etching is a critical step in the fabrication of CMOS transistors, particularly for gate electrode definition.
The process follows polysilicon deposition and lithographic patterning, and precedes subsequent oxidation, spacer formation, or silicidation steps.
Applications
General reference — not yet source-verifiedThe tool is applied to the etching of polysilicon layers in logic, memory, and other integrated circuits.
Common applications include gate etch for CMOS transistors, as well as polysilicon structures in flash memory and other non-volatile memory devices.
What do the numbers mean?
Wafer handling1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 2300 e 5 Kiyo EXP Polysilicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the 2300 e 5 Kiyo EXP Polysilicon are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 e 5 Kiyo EXP Polysilicon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 e 5 Kiyo EXP Polysilicon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 e 5 Kiyo EXP Polysilicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2300 e 5 Kiyo EXP Polysilicon are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Sep 1, 2026.