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Lam Research

2300 V 2 Kiyo 45

EtchLam Research 2300 family
Research Quality: 20% complete
2300 V 2 Kiyo 45 — Inventory photo
Fig. 012300 V 2 Kiyo 45Inventory photo[1]

What is it?

What do the numbers mean?

Configuration & options4

Polysilicon[2]
Accurate?
4ch[2]
Accurate?
SiCl4 / BCl3 / HBr / CH4 / CHF3 / Cl2 / CH2F2 / CH3F / NF3 / O2 / CF4 / He / Ar / N2[2]
Accurate?
Edwards STP XA2703CV[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Lam 2300 V 2 Kiyo 45 Etcher - Polysilicon - 4ch - SiCl4 / BCl3 / HBr / CH4 / CHF3 / Cl2 / CH2F2 / CH3F / NF3 / O2 / CF4 / He / Ar / N2 - Edwards STP XA2703CV 2008 Vintage2008Listed with polysilicon, 4ch, the gas set, Edwards STP XA2703CV, and 2008 vintage.Equipment inventory listing[2]
Lam 2300 V 2 Kiyo 45 Etcher - Polysilicon - 4ch - SiCl4 / BCl3 / HBr / CH4 / CHF3 / Cl2 / CH2F2 / CH3F / NF3 / O2 / CF4 / He / Ar / N2 - Edwards STP XA2703CV 2007 Vintage2007Listed with polysilicon, 4ch, the gas set, Edwards STP XA2703CV, and 2007 vintage.Equipment inventory listing[4]
Lam 2300 V 2 Kiyo 45 Etcher - Polysilicon - 4ch - SiCl4 / BCl3 / HBr / CH4 / CHF3 / Cl2 / CH2F2 / CH3F / NF3 / O2 / CF4 / He / Ar / N2 - Edwards STP XA2703CV 2009 Vintage2009Listed with polysilicon, 4ch, the gas set, Edwards STP XA2703CV, and 2009 vintage.Equipment inventory listing[5]
Lam 2300 V 2 Kiyo 45 Etcher2007–2007Listed with an Edwards STP XA2703CV pump and described as 2007 vintage.Equipment inventory listing[4]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 2300 V 2 Kiyo 45 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 V 2 Kiyo 45 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 2300 V 2 Kiyo 45 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2300 V 2 Kiyo 45 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2300 V 2 Kiyo 45 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 2300 V 2 Kiyo 45 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (7)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
  7. [7]Equipment inventory listing
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Last updated Jul 29, 2026.

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