Lam Research
2300 V 2 Kiyo EX Metal Metal
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedPlasma etch systems remove material from the wafer surface using chemically reactive ions generated in a low-pressure, radio-frequency discharge. Metal etch chambers are specifically engineered to handle conductive layers such as aluminum, tungsten, or copper, requiring precise control of etch chemistry, ion energy, and byproduct volatilization.
Where it fits in the process flow
General reference — not yet source-verifiedMetal etch is typically performed after metal deposition (e.g., sputtering or electroplating) and before subsequent dielectric deposition or cleaning steps. In a back-end-of-line (BEOL) flow, the tool defines interconnect lines and vias in the metal layers.
The system is used in conjunction with photoresist masks or hard masks to transfer patterns into the metal layer. Downstream processing may include photoresist removal, wet cleaning, and barrier layer deposition.
Applications
General reference — not yet source-verifiedThe Lam Research 2300 V 2 Kiyo EX Metal Metal Etch is applied to the etching of metal layers in advanced logic and memory devices. Common applications include aluminum interconnect lines, tungsten plugs, and copper damascene structures.
What do the numbers mean?
Power & electrical1
Wafer handling1
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Model2300 V 2 Kiyo EX Metal Metal[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the full model designation of this equipment?
The model is the Lam Research 2300 V 2 Kiyo EX Metal Metal Etch.[1]
Not publicly documented
The following facts about the 2300 V 2 Kiyo EX Metal Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 V 2 Kiyo EX Metal Metal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 V 2 Kiyo EX Metal Metal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 V 2 Kiyo EX Metal Metal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2300 V 2 Kiyo EX Metal Metal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2300 V 2 Kiyo EX Metal Metal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Aug 20, 2026.