Lam Research
2300 V 2 Versys Kiyo 45 Polysilicon
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Lam Research 2300 V 2 Versys Kiyo 45 is a polysilicon etch system. The system handles 12-inch wafers.[1]
How it works
General reference — not yet source-verifiedPolysilicon etch systems typically use a capacitively coupled plasma source. The process gas, often containing fluorine or chlorine, is ionized to create reactive species that etch the polysilicon. The etch process is highly anisotropic to achieve vertical sidewalls.
What do the numbers mean?
Power & electrical1
Wafer handling1
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Model2300 V 2 Versys Kiyo 45[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the 2300 V 2 Versys Kiyo 45 Polysilicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 V 2 Versys Kiyo 45 Polysilicon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 V 2 Versys Kiyo 45 Polysilicon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 V 2 Versys Kiyo 45 Polysilicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2300 V 2 Versys Kiyo 45 Polysilicon are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2300 V 2 Versys Kiyo 45 Polysilicon is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Sep 1, 2026.