Lam Research
839 800327 315 ESC
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedDuring operation, the ESC secures the wafer within a vacuum chamber. An electrostatic force clamps the wafer in place, and the chuck can be biased to influence the energy and direction of ions formed in the plasma.
Where it fits in the process flow
General reference — not yet source-verifiedThe electrostatic chuck is a key component within the etch module of a semiconductor fabrication line. Wafers are loaded onto the chuck, undergo plasma etching, and are then unloaded for subsequent steps.
Applications
What do the numbers mean?
Wafer handling1
Configuration & options6
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 839 800327 315 ESC are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 839 800327 315 ESC are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 839 800327 315 ESC are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 839 800327 315 ESC are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 839 800327 315 ESC are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 839 800327 315 ESC is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]inventory listing
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]Lam Research 839 800327 315 ESC family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 12, 2026.
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