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Lam Research

9600 BRME Metal

EtchLam Research TCP 9600 family
Research Quality: 30% complete
9600 BRME Metal — Inventory photo
Fig. 019600 BRME MetalInventory photo[1]

What is it?

The Lam 9600 BRME is a metal etch system with an 8-inch wafer size.

What do the numbers mean?

Wafer handling2

Handler System
Robot[1]
Accurate?
Factory Interface
Open Cassette[1]
Accurate?

Control & software1

Software Version
E 2.0.1-88 B[1]
Accurate?

Configuration & options1

CIM
Secs, GEM[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 9600 BRME Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9600 BRME Metal are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 9600 BRME Metal are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 9600 BRME Metal are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 9600 BRME Metal are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 9600 BRME Metal is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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