Lam Research
9600 Dry
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedDry etch systems process wafers in a vacuum chamber.
Process gases enter the chamber and are energized by radio-frequency power to form a plasma.
Where it fits in the process flow
General reference — not yet source-verifiedDry etching is a pattern-transfer operation in semiconductor manufacturing.
An etch step follows photolithography, in which a patterned mask has been formed on the wafer.
Applications
The TCP 9600 is a dry etch system for metal etching.[2]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Missing PC and Turbo / Controller
What do the numbers mean?
Vacuum & pumping1
- Missing PC and Turbo / Controller[1]
Wafer handling1
Configuration & options1
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationMissing PC and Turbo / Controller[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 9600 Dry are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9600 Dry are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 9600 Dry are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 9600 Dry are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 9600 Dry is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 9600 Dry are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]fabsurplus.com — fabsurplus.comfabsurplus.com
Last updated Aug 20, 2026.