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Lam Research

Alliance 6 9400 PTX

EtchLam Research Alliance family
Research Quality: 20% complete
Alliance 6 9400 PTX — Inventory photo
Fig. 01Alliance 6 9400 PTXInventory photo[1]

Power

208 VAC[1]

Vacuum

No Chiller or Pumps included[1]

What is it?

What do the numbers mean?

Power & electrical3

Voltage
208 VAC[1]
Accurate?
50/60 Hz[1]
Accurate?
Full Load Current
43 Amps[1]
Accurate?

Vacuum & pumping1

No Chiller or Pumps included[1]
Accurate?

Configuration & options6

3 Chamber[2]
Accurate?
Lam A6[1]
Accurate?
Capacity of Main Breaker
10 kA[1]
Accurate?
Upgraded to Windows 7[1]
Accurate?
Using OES end point[1]
Accurate?
All 3 Poly Etch Chambers[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage208 VAC[1]
  • Configuration50/60 Hz[1]
  • Full Load Current43 Amps[1]
  • ConfigurationNo Chiller or Pumps included[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Alliance 6 9400 PTX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alliance 6 9400 PTX are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Alliance 6 9400 PTX are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Alliance 6 9400 PTX are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Alliance 6 9400 PTX are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Alliance 6 9400 PTX is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
  3. [3]Equipment inventory listing
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Last updated Jul 29, 2026.

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