Lam Research Alliance

Models in this family

1. 

   Alliance 4400
2. Alliance 6 4720 XL

   The Lam Alliance 6 4720 XL is an etch tool for 8-inch wafers.

3. Alliance 6 9400 DSIE
4. 

   Alliance 6 9400 PTX
5. Alliance 9100 PTX Dry
6. 

   Alliance 9400 DSiE

   The Lam Alliance 9400 DSiE is an etcher described with 6-inch wafer size and 3 chambers.

7. 

   Alliance A 6
8. 

   Alliance A 6 9400 DSIE III Process

   The Lam Alliance A 6 9400 DSIE III is an 8-inch process chamber.

9. Alliance A 6 Exelan HP Dielectric

   Lam Alliance A 6 Exelan HP Dielectric is an etch tool with an 8-inch wafer size.

10. Alliance A 6 Multi-Process