Lam Research

Alliance A 6 TCP 9400 DFM Polysilicon

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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Power

208 VAC^[2]

Vacuum

Busch DS 80 Cobra, Busch BA 100 (2)^[1]

Gas delivery

Enhanced Universal (12 sticks)^[1]

What it is

The 9400 DFM is configured for eight-inch wafer processing and includes a transport module and process modules for polysilicon and tungsten silicide etching.^[1]^[2]

How it works

The system uses an anodized aluminum electrostatic chuck and an interferometric endpoint detection module on process module 4. The gas delivery includes an enhanced universal gas box with twelve gas sticks. The system is equipped with Brooks GF 125 and Mag 7 dry pumps, and two Busch pumps (DS 80 Cobra and BA 100). Chilling is provided by an Edwards 40/80 Plus temperature control unit. Electrical specifications include 208 VAC, 50/60 Hz, with a full load current of 43 A and a main circuit breaker rating of 50 A.^[1]^[2]

What do the numbers mean?

Power & electrical3

Voltage: 208 VAC^[2]
Frequency: 50/60 Hz^[2]
Chillers: TCU Edwards 40/80 Plus, RPM Voltage SAG Enhanced^[1]

Vacuum & pumping1

Pumps: Busch DS 80 Cobra, Busch BA 100 (2)^[1]

Wafer handling1

Wafer Size: 8 inch^[1]

Gas & chemistry1

Gas Box: Enhanced Universal (12 sticks)^[1]

Control & software1

Software Version: A4.0-37VM^[1]

Configuration & options6

Full Load Current: 43 A^[2]
Short Circuit Interrupting Capacity: 10 kA^[2]
Main Circuit Breaker Rating: 50 A^[2]
ESC Material: Anodized Aluminum^[1]
Interferometer EP: PM4^[1]
Transport Module: TCP 9400 FM-P (Tungsten Silicide Etch)^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage208 VAC^[2]
Frequency50/60 Hz^[2]
Gas BoxEnhanced Universal (12 sticks)^[1]
PumpsBusch DS 80 Cobra, Busch BA 100 (2)^[1]
ChillersTCU Edwards 40/80 Plus, RPM Voltage SAG Enhanced^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Alliance A 6 TCP 9400 DFM Polysilicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alliance A 6 TCP 9400 DFM Polysilicon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alliance A 6 TCP 9400 DFM Polysilicon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alliance A 6 TCP 9400 DFM Polysilicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alliance A 6 TCP 9400 DFM Polysilicon are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alliance A 6 TCP 9400 DFM Polysilicon is not on record.
Answerable by: an OEM datasheet or a fab qualification report