Lam Research
Rainbow 4420 Multi-Process
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Lam Research Rainbow 4420 is a multi-process etch system designed for eight-inch wafers.[1]
How it works
General reference — not yet source-verifiedRainbow-series etchers typically use a parallel-plate reactor configuration with radio-frequency power applied to one electrode to generate a plasma.
The system operates in reactive ion etching mode, where ions from the plasma bombard the wafer surface to enable anisotropic etch profiles.
Applications
General reference — not yet source-verifiedThe system is used for etching dielectric materials such as silicon dioxide and silicon nitride.
What do the numbers mean?
Wafer handling1
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Rainbow 4420 Multi-Process are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 4420 Multi-Process are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 4420 Multi-Process are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 4420 Multi-Process are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 4420 Multi-Process are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 4420 Multi-Process is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Sep 1, 2026.