Lam Research
SEZ 203 Spin
What is it?
What do the numbers mean?
Wafer handling5
Gas & chemistry1
Control & software2
Configuration & options11
- Process; Backside Clean[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 2004 vintage | — | 2004 | — | Equipment inventory listing[6] |
| 2010 vintage | — | 2010 | — | Equipment inventory listing[1] |
| 1998 vintage | — | 1998 | — | Equipment inventory listing[2] |
| Lam / SEZ 203 Spin Etcher (1998 vintage) | — | 1998 | CIM: SECS/GEM; Process: Cobalt Backside Clean; Handler: Robot; Factory Interface: SMIF (2); Options: UPS | Equipment inventory listing[2] |
| Lam / SEZ 203 Spin Etcher (2004 vintage) | — | 2004 | No additional details specified beyond vintage year | Equipment inventory listing[6] |
| Lam / SEZ 203 Spin Etcher (2010 vintage) | — | 2010 | Software Version: 12.29.09.2000; CIM: GEM; Process: Backside Clean; Handler: Robot; Factory Interface: SMIF (2) | Equipment inventory listing[1] |
| Lam SEZ 203 Spin Processor (8 inch) | — | — | Two open cassettes, 3 chemical cabinets (CDS), Bernoulli wafer handling/chuck/grippers | tech-semi.com[7] |
| SEZ 203 Spin Processing Wet System (200mm) | — | 2001 | 200mm version; vintage date 01.03.2001 | fabsurplus.com[5] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Chemical cabinets (CDS)3[7]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the SEZ 203 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SEZ 203 Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the SEZ 203 Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SEZ 203 Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SEZ 203 Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SEZ 203 Spin are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (8)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]fabsurplus.com — fabsurplus.comfabsurplus.com
- [6]Equipment inventory listing
- [7]tech-semi.com — tech-semi.comtech-semi.com
- [8]Equipment inventory listing
Last updated Aug 25, 2026.