Lam Research
TCP 9400 SE Polysilicon
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam TCP 9400 SE Polysilicon Etch is an 8-inch wafer etcher designed for polysilicon etching.[1]
What it is
The Lam TCP 9400 SE is a polysilicon etch system. The system processes 8-inch wafers.[1]
How it works
General reference — not yet source-verifiedTransformer coupled plasma etchers couple radio-frequency power through a coil outside the chamber to create a high-density plasma. The plasma density is controlled independently of ion energy, allowing anisotropic etching profiles. The TCP design enables stable operation over a range of process conditions.
Where it fits in the process flow
General reference — not yet source-verifiedPolysilicon etching is a front-end-of-line process step used to define transistor gate electrodes. The etch system is typically positioned after polysilicon deposition and doping, and before subsequent cleaning or oxidation steps. In a CMOS fabrication flow, the polysilicon gate patterning is critical for device performance.
What do the numbers mean?
Wafer handling1
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the TCP 9400 SE Polysilicon are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the TCP 9400 SE Polysilicon are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TCP 9400 SE Polysilicon are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TCP 9400 SE Polysilicon are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TCP 9400 SE Polysilicon are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TCP 9400 SE Polysilicon are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Sep 1, 2026.