Leybold
MAG W 2800 CT Turbo
What it is
General reference — not yet source-verifiedA turbo pump is a high-vacuum pump used to evacuate process chambers and vacuum lines in semiconductor tools. A turbo pump in deposition service supports the vacuum environment needed for stable gas transport, contamination control, and repeatable chamber conditions.
How it works
General reference — not yet source-verifiedTurbomolecular pumps use rapidly rotating blade stages to transfer momentum to gas molecules and move gas from the chamber toward a backing vacuum stage. Magnetic bearing designs in this equipment class suspend the rotor without normal mechanical contact during operation, which reduces friction and helps limit internally generated particles.
Where it fits in the process flow
General reference — not yet source-verifiedTurbo pumps sit beneath or beside vacuum process chambers and support the base pressure and pumpdown conditions required before and during process steps. In fab flow, such pumps are part of the vacuum infrastructure of chambered tools rather than wafer handling, metrology, or patterning modules.
What do the numbers mean?
Power & electrical3
Vacuum & pumping3
Configuration & options6
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Denton Vacuum Discovery Cathode— Same function class: Deposition, UnknownCompare in depthsource[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the MAG W 2800 CT Turbo are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MAG W 2800 CT Turbo are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MAG W 2800 CT Turbo are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MAG W 2800 CT Turbo are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MAG W 2800 CT Turbo are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MAG W 2800 CT Turbo is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Equipment inventory listing
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]vachigh.comvachigh.com
Last updated Oct 21, 2026.
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