Lindberg
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The Lindberg/Blue M HTF and STF series tube furnaces employ three-zone control systems for precise temperature management. Each zone is measured by an individual thermocouple and is controlled by a digital temperature controller. The furnaces require a customer‑supplied process tube for operation.[3]
In semiconductor manufacturing, tube furnaces are used for thermal processes such as diffusion, oxidation, annealing, and chemical vapor deposition. The wafers are loaded into the process tube in a boat and subjected to controlled temperature ramps and gas flows. Tube furnaces are typically preceded by wafer cleaning and followed by metrology steps to verify film thickness or junction depth.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Mini-Mite TF55030A | — | — | Single setpoint digital control, 120 VAC | mrsec.ucsd.edu[1] |
| Mini-Mite TF55030C | — | — | Single setpoint digital control, 208/240 VAC | mrsec.ucsd.edu[1] |
| Mini-Mite TF55035A | — | — | Programmable digital control, 120 VAC | mrsec.ucsd.edu[1] |
| Mini-Mite TF55035C | — | — | Programmable digital control, 208/240 VAC | mrsec.ucsd.edu[1] |
| Mini-Mite TF55030KC | — | — | Programmable digital control, 208/240 VAC (K-type thermocouple variant) | mrsec.ucsd.edu[1] |
| Mini-Mite TF55035KC | — | — | Programmable digital control, 208/240 VAC (K-type thermocouple variant) | mrsec.ucsd.edu[1] |
| STF55346C-1 | — | — | Three-zone tube furnace with control console | knowledge1.thermofisher.com[3] |
| STF55666C-1 | — | — | Three-zone tube furnace with control console | knowledge1.thermofisher.com[3] |
| HTF55347C | — | — | Three-zone tube furnace with control console | knowledge1.thermofisher.com[3] |
| HTF55667C | — | — | Three-zone tube furnace with control console | knowledge1.thermofisher.com[3] |
| STF55433 | — | — | 1500°C general-purpose tube furnace | knowledge1.thermofisher.com[2] |
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The following facts about the Tube are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Tube are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Tube are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Tube are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Tube is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Tube are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Last updated Aug 20, 2026.