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Micro-Vu

Excel 664

Micro-Vu Excel 664 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Micro-Vu Excel 664 is a video measurement system. The Micro-Vu Excel 664 is used for dimensional inspection of parts. The Micro-Vu Excel 664 has a 27" x 26" x 16" measuring capacity.[1][2][3]

Micro-VuExcel 664
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Where it fits in the process flow

The Micro-Vu Excel 664 is used for dimensional inspection of parts. The Micro-Vu Excel 664 can be used with multiples of smaller parts nested in a fixture. Operators load parts and start a measurement program, and the machine can run for hours while operators work on other inspection and quality tasks.[1][2]

Applications

The Micro-Vu Excel 664 is used for dimensional inspection of parts. Excel 664 systems are commonly used with multiples of smaller parts nested in a fixture.[1][2]

What do the numbers mean?

Configuration & options3

Machine type
Video measurement system[1]
Accurate?
Operating style
Freestanding, fully automated and programmable[1]
Accurate?
Measuring capacity
27" x 26" x 16"[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What kind of machine is the Micro-Vu Excel 664?

It is a freestanding, fully automated and programmable video measurement system.[2]

Not publicly documented

The following facts about the Excel 664 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Excel 664 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Excel 664 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Excel 664 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Excel 664 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Excel 664 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]atiquality.com — atiquality.comatiquality.com
  3. [3]Micro-Vu Excel 664 family | Waferpedia — waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
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Last updated Oct 20, 2026.

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