Waferpedia

Nikon

Eclipse L 200

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Nikon Eclipse L 200 is an IC inspection microscope. The Nikon Eclipse L 200 has 6-inch wafer support.[1]

Eclipse L 200 — Inventory photo
Fig. 01Eclipse L 200Inventory photo[2]

What it is

The Nikon Eclipse L 200 is a microscope used in metrology and inspection work. The Nikon Eclipse L 200 ND is an IC inspection microscope with 6-inch wafer support. The Eclipse L 200 ND family includes the Eclipse L 200 ND model. The L200ND and L200N share instructions that apply to both models.[2][1]

How it works

General reference — not yet source-verified

An IC inspection microscope forms a magnified optical image of wafer features so an operator can inspect surface patterns and defects. Inspection microscopes of this class typically combine reflected-light viewing, precision stage motion, focus control, and multiple observation modes to let an operator examine different layers and topographies across a sample.

Where it fits in the process flow

General reference — not yet source-verified

Inspection microscopes sit in the characterization and verification part of fab operations rather than in the patterning, deposition, or etch functions themselves. Inspection microscopes are commonly used around lithography, thin-film, etch, clean, and packaging-related steps when operators need visual confirmation of pattern quality, alignment condition, residue, scratches, or other observable defects.

Applications

The Nikon Eclipse L 200 ND is used for IC inspection and supports 6-inch wafers.[1]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Unable to test

What do the numbers mean?

Wafer handling1

Wafer support
6-inch wafer support[1]
Accurate?

Configuration & options5

Unable to test, sold As-Is[2]
Accurate?
OEM
Nikon[2]
Accurate?
Model
Eclipse L 200[2]
Accurate?
Tool family
Nikon Eclipse L 200 ND[1]
Accurate?
Tool type
IC inspection microscope[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
ECLIPSE L200N——Manual states the L200ND/L200N instructions apply to both models.waferpedia.com[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Nikon Eclipse L 200 ND?

The Nikon Eclipse L 200 ND is an IC inspection microscope.[1]

What wafer size does the Nikon Eclipse L 200 ND support?

The Nikon Eclipse L 200 ND supports 6-inch wafers.[1]

Are the L200ND and L200N handled together in the same instructions?

The L200ND and L200N use instructions that apply to both models.[1]

Not publicly documented

The following facts about the Eclipse L 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Eclipse L 200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Eclipse L 200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Eclipse L 200 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Eclipse L 200 are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the Eclipse L 200 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
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Last updated Oct 16, 2026.

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