Waferpedia

Nikon

NSR i 11 C i-Line

LithographyNikon NSR family
Research Quality: 20% complete
Nikon logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Power

Main lamp and lamp power supply[1]

Optics

I-Line Exposure[1]

What it is

The Nikon NSR i 11 C is an i-Line stepper for semiconductor lithography.[1]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Main lamp and lamp power supply missing
  • Main console monitor and accessory missing

What do the numbers mean?

Power & electrical1

Main lamp and lamp power supply[1]
Accurate?

Optics & imaging1

I-Line Exposure[1]
Accurate?

Configuration & options3

OS
Open VMS[1]
Accurate?
Missing:[1]
Accurate?
Main console monitor and accessory[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationMain lamp and lamp power supply[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What type of equipment is the Nikon NSR i 11 C?

It is an i-Line stepper.[1]

Not publicly documented

The following facts about the NSR i 11 C i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR i 11 C i-Line are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR i 11 C i-Line are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR i 11 C i-Line are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the NSR i 11 C i-Line is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the NSR i 11 C i-Line are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Jul 29, 2026.

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