Nikon
NSR S 208 D
The Nikon NSR-S208D is a 248 nm deep UV scanner for 110 nm devices and sub-critical 90 nm layers. The NSR-S208D features a 0.82 NA lens and delivers >147 wph on 300 mm wafers.[1]
What it is
General reference — not yet source-verifiedLithography steppers project a patterned reticle image onto photoresist-coated wafers. Lithography steppers are core patterning tools in semiconductor manufacturing.
How it works
General reference — not yet source-verifiedWhere it fits in the process flow
General reference — not yet source-verifiedLithography tools are used after wafer preparation, film formation, and photoresist coating, and before development, pattern transfer, and resist stripping. Lithography exposure defines the pattern that later etch or implant steps will follow.
Applications
General reference — not yet source-verifiedKrF lithography tools are used to print critical device patterns in semiconductor process flows. Lithography exposure can be applied to layers that require precise imaging and overlay so that later process steps reproduce the intended circuit geometry.
What do the numbers mean?
Power & electrical3
- Amp Rack[2]
Wafer handling4
Optics & imaging5
- Cymer Laser[2]
Performance5
Control & software4
Configuration & options5
- Air Conditioner[2]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What exposure wavelength does the Nikon NSR-S208D use?
The Nikon NSR-S208D uses a 248 nm exposure wavelength.[1]
Not publicly documented
The following facts about the NSR S 208 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 208 D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR S 208 D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR S 208 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR S 208 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR S 208 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]web.archive.org — nikonprecision.com (Jun 17, 2006)web.archive.org
- [2]Inventory photo
- [3]Inventory photo
- [4]Equipment inventory listing
Last updated Oct 18, 2026.
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