Waferpedia

Nikon

NSR S 208 D

LithographyNikon NSR S 208 family
Research Quality: 20% complete
NSR S 208 D — Inventory photo
Fig. 01NSR S 208 DInventory photo[1]

Power

Amp Rack[1]

Optics

Cymer Laser[1]

What is it?

What do the numbers mean?

Power & electrical1

Amp Rack[1]
Accurate?

Wafer handling1

Handler System
external FOUP system[1]
Accurate?

Optics & imaging1

Cymer Laser[1]
Accurate?

Control & software3

Software ver. MCSW 180-P12/OCSW ver. 180-P10[1]
Accurate?
Factory Interface
SMIF[1]
Accurate?
Temperature Controller[1]
Accurate?

Configuration & options3

CIM
SECs[1]
Accurate?
Process
kRF[1]
Accurate?
Air Conditioner[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationAmp Rack[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the NSR S 208 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 208 D are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NSR S 208 D are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NSR S 208 D are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NSR S 208 D are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NSR S 208 D is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Equipment inventory listing
  4. [4]Nikon Precision Incnikonprecision.com (Jun 17, 2006)web.archive.org
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Last updated Jul 29, 2026.

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