Novellus
300
Wafer size
300mm
Gas delivery
Chemical vapor deposition (CVD)[1]
What it is
The Novellus 300 is a family of 300 mm Novellus tools. ATHENA software is available for Novellus 300 mm tools that use the Proteus user interface. ATHENA is a platform for high-resolution data collection and management, advanced equipment applications, advanced factory automation, and remote e-diagnostics connectivity.[2][3][4]
How it works
ATHENA on Novellus 300 tools is organized into three modules: Athena Knowledge Base, Athena Advanced Factory Automation, and Athena Remote. Athena Knowledge Base includes statistical process control, equipment fault monitoring and notification, sensor integration, and remote connectivity for e-diagnostics. Athena Advanced Factory Automation provides SEMI standards for Equipment Data Acquisition, called Interface A, and connections to interfaces such as Modbus and HSMS. Athena Remote enables access to the Novellus tool GUI and the ATHENA KB GUI from a computer outside of the cleanroom.[2][3]
Where it fits in the process flow
General reference — not yet source-verifiedWet processing tools are typically placed between film formation, patterning, etch, implant, and inspection operations wherever wafers need surface preparation or residue removal. Wet cleaning steps commonly appear both before critical patterning sequences and after processes that leave particles, polymers, native films, or metallic contamination on the wafer surface.
Applications
ATHENA on Novellus 300 tools supports data collection and management, advanced equipment applications, advanced factory automation, and remote e-diagnostics connectivity. ATHENA also supports monitoring functions that include statistical process control, equipment fault monitoring and notification, and sensor integration.[2][3]
- Statistical Process control
- equipment fault monitoring and notification
- sensor integration
- remote connectivity for e-diagnostics
- advanced factory automation
What do the numbers mean?
Wafer handling1
Gas & chemistry1
Optics & imaging1
- Platform function
- High-resolution data collection and management, advanced equipment applications, advanced factory automation, and remote e-diagnostics connectivity[2]
Control & software5
- AKB capabilities
- Statistical Process control, equipment fault monitoring and notification, sensor integration, and remote connectivity for e-diagnostics[2]
- AFA standards and interfaces
- SEMI standards for Equipment Data Acquisition (EDA) "Interface A"; connections to Modbus and HSMS[2]
- AR function
- Enables access to the Novellus tool GUI and the ATHENA KB GUI from a computer outside of the cleanroom[2]
- Software / platform
- ATHENA software for Novellus 300 mm tools using the Proteus user interface[3]
Configuration & options4
- Modules
- Athena Knowledge Base (AKB), Athena Advanced Factory Automation (AFA), Athena Remote (AR)[2]
Vintage & configurations
- 2000-07-10Launch of Vector platform[1]
Novellus launched the Vector platform as a compact 300 mm CVD tool.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Process typeChemical vapor deposition (CVD)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Which Novellus 300 tools can use ATHENA software?
ATHENA software is available for Novellus 300 mm tools that use the Proteus user interface.[2][3][4]
Not publicly documented
The following facts about the 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the 300 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 300 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]eetimes.com — eetimes.comeetimes.com
- [2]web.archive.org — web.archive.orgweb.archive.org
- [3]web.archive.org — web.archive.orgweb.archive.org
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
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