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OAI

Model 200

LithographyOAI Model 200 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

OAIModel 200
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What it is

General reference — not yet source-verified

Mask aligners are photolithography tools used to transfer patterns from a photomask onto a photosensitive substrate, typically a semiconductor wafer. Mask aligners operate by bringing a mask into proximity or contact with the substrate and exposing it to ultraviolet (UV) light.

How it works

General reference — not yet source-verified

A mask aligner typically contains a UV light source, a collimation optical system, a mask holder, a substrate chuck with alignment stages, and an exposure controller. The operator loads a substrate, aligns the mask relative to the substrate using manual or semi-automatic controls, and then exposes the photoresist-coated substrate to a controlled dose of UV light through the mask.

The OAI Model 200, as a tabletop mask aligner, is designed for manual or semi-automatic operation in a compact footprint. The system incorporates proven industrial components to achieve reliable exposure results.

What do the numbers mean?

Optics & imaging1

Equipment Type
Tabletop Mask Aligner[1]
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What replaced it?

  • siblingOAI Model 6020— Listed under the same 'Mask Aligners' datasheet section on the resources page.source[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of mask aligner is the OAI Model 200?

The OAI Model 200 is a tabletop mask aligner.[1]

Not publicly documented

The following facts about the Model 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the Model 200 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Model 200 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Model 200 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Model 200 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Model 200 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]oainet.com — oainet.comoainet.com
  2. [2]Resources – Optical Associates, Inc. — oainet.comoainet.com
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Last updated Oct 9, 2026.

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