OAI
Model 6020
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The OAI Model 6020 is a mask aligner in the photolithography equipment class.[1]
How it works
General reference — not yet source-verifiedThe exposure step uses light to project the mask pattern into the resist layer on the substrate.
Where it fits in the process flow
General reference — not yet source-verifiedMask alignment and exposure occur after photoresist coating and before development in a lithography flow.
The OAI Model 6020 belongs in front-end patterning work where circuit, device, or microstructure features are defined on a surface.
Applications
General reference — not yet source-verifiedMask aligners are used in photolithography for semiconductor fabrication and related microfabrication work.
Mask aligners are also used in advanced packaging, microelectromechanical systems, sensors, microfluidics, and bio-medical patterning.
What do the numbers mean?
Optics & imaging1
What replaced it?
Related models
- siblingOAI Model 200— Listed under the same 'Mask Aligners' datasheet section on the resources page.source[1]
- siblingOAI Model 212— Listed under the same 'Mask Aligners' datasheet section on the resources page.source[1]
- siblingOAI Model 6000— Listed under the same 'Mask Aligners' datasheet section on the resources page.source[1]
- siblingOAI Model 32— Listed under 'UV Exposure Systems' datasheet section; sibling as a UV exposure system.source[1]
- siblingOAI Model 2012— Listed under 'UV Exposure Systems' datasheet section; sibling as a UV exposure system.source[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Model 6020 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the Model 6020 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Model 6020 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Model 6020 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Model 6020 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Model 6020 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]oainet.com — oainet.comoainet.com
Last updated Oct 11, 2026.
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