OAI
Model 6000
Plate 01OAI Model 6000 Mask Aligner System
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What it is
The OAI Model 6000 is a fully automated front and backside mask aligner system intended for production use. The tool handles both front-side and back-side alignment in a single automated platform.[1]
How it works
General reference — not yet source-verifiedMask aligners operate by bringing a photomask into close proximity or contact with a resist-coated substrate, aligning the mask pattern to existing features on the substrate, and then exposing the resist through the mask with a controlled ultraviolet source. Front and backside alignment capability allows the system to register patterns on both sides of the substrate, which is essential for double-sided lithography processes.
Where it fits in the process flow
General reference — not yet source-verifiedMask aligners are used in the photolithography step of semiconductor and microdevice fabrication. The tool receives substrates that have been cleaned and coated with photoresist; after alignment and exposure, the substrate moves to a development step to create the patterned resist mask for subsequent etching, deposition, or other processing.
What can it run?
Process applications and technology nodes documented for this tool.
- Production semiconductors
- MEMS
- Sensors
- Advanced packaging
- Microfluidics
- Photolithography
What do the numbers mean?
Optics & imaging2
Configuration & options2
- Integrated lithography cell[1]
What replaced it?
Related models
- siblingOAI Model 6020— Listed under the same 'Mask Aligners' datasheet section on the resources page.source[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of alignment does the OAI Model 6000 support?
The OAI Model 6000 supports both front-side and back-side alignment.[1]
What are the primary applications for the OAI Model 6000?
The OAI Model 6000 is used for production semiconductors, MEMS, sensors, advanced packaging, IOT, and microfluidics.[1]
Not publicly documented
The following facts about the Model 6000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Model 6000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Model 6000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Model 6000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Model 6000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Model 6000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]oainet.com — oainet.comoainet.com
- [2]Resources – Optical Associates, Inc. — oainet.comoainet.com
Last updated Oct 9, 2026.
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