Ultra Fusion Series

The Orbotech Ultra Fusion Series is an inspection system in the metrology and inspection category. The Orbotech Ultra Fusion Series has a minimum line and space capability of 5/5 μm and a minimum defect size of 1.2 μm.^[1][2][3]

The Orbotech Ultra Fusion Series supports magnification from 220x to 5000x. The Orbotech Ultra Fusion Series has a field of view from 1.2 mm to 0.19 mm. The Orbotech Ultra Fusion Series uses three independently controlled LED-based white illumination types: coaxial, diffusive, and grazing. The Orbotech Ultra Fusion Series also includes controllable UV illumination. The Orbotech Ultra Fusion Series includes autofocus and image processing. The Orbotech Ultra Fusion Series has an average time between defects of 0.7 seconds. The Orbotech Ultra Fusion Series uses a 23 inch image display and runs on Linux.^[1][2]

Optical inspection tools are typically used after patterning, etch, deposition, clean, or other unit processes when a fab needs to verify pattern integrity or search for visible defects. Inspection data from tools in this class can feed process monitoring, engineering review, and yield analysis workflows.

Inspection systems of this class are applied to patterned surfaces where optical contrast can reveal contamination, missing or extra material, scratches, bridging, opens, and other visible anomalies. Metrology and inspection tools of this class are used in process development, excursion response, and routine manufacturing monitoring.