Orbotech
The Orbotech Ultra Fusion Series is an inspection system. The Orbotech Ultra Fusion Series has a minimum line/space of 5/5 μm and a minimum defect size of 1.2 μm.[1]
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The magnification range is 220x to 5000x.[1]
The system uses three independently controlled LED-based illumination types: coaxial, diffusive, and grazing. Controllable UV illumination is also available.[1]
The system runs on the Linux operating system.[1]
The average time between defects is 0.7 seconds.[1]
The following facts about the Ultra Fusion Series are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Ultra Fusion Series are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Ultra Fusion Series are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Ultra Fusion Series are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Ultra Fusion Series are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Ultra Fusion Series is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Aug 21, 2026.
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