Oxford Instruments
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The Oxford Instruments 80 Plus RIE is a reactive ion etcher used for semiconductor etching.[1]
A reactive ion etcher combines low-pressure plasma chemistry with ion bombardment so that material removal is directional rather than purely isotropic. Gas is introduced into the chamber, plasma is formed, and energized species interact with the exposed surface to drive etching where the pattern is open.
This class of tool typically uses a powered electrode and a grounded chamber or platen arrangement to help control ion energy and etch directionality. The process is generally chosen when profile control and transfer of fine patterns are more important than bulk removal rate.
Reactive ion etching sits in the pattern-transfer portion of fabrication, after lithography has defined openings in a mask or resist and before subsequent stripping, cleaning, or later process steps.
It is used when a patterned film or substrate must be etched with controlled sidewalls and limited undercut, making it a common step in device and microstructure fabrication.
Tools in this class are used for anisotropic etching of thin films and substrate layers in semiconductor and microfabrication work.
They are commonly applied to pattern transfer in dielectric, conductor, and semiconductor materials where directional etch behavior is needed.
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The following facts about the 80 Plus RIE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the 80 Plus RIE are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 80 Plus RIE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 80 Plus RIE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 80 Plus RIE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 80 Plus RIE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Last updated Jul 29, 2026.