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Oxford Instruments

ngp80-rie

EtchOxford Instruments ngp80-rie family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Oxford NGP80 RIE is a plasma etch system located in room W1-062.[1]

Oxford Instrumentsngp80-rie
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What is it?

The source identifies Oxford NGP80 RIE as an equipment page and associates it with plasma etch. No additional specifications, lifecycle information, or operating details are stated in the provided source.

What do the numbers mean?

Configuration & options3

Model
NGP80 RIE[2]
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OEM
Oxford[2]
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Related equipment page label
Oxford NGP80 RIE[2]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What process area is the Oxford NGP80 RIE located in?

The Oxford NGP80 RIE is located in the plasma etch process area, room W1-062.[1]

Is there a standard operating procedure available for the NGP80?

Yes, there is a standard operating procedure (SOP) document for the Oxford NGP80 RIE.[1]

Not publicly documented

The following facts about the ngp80-rie are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ngp80-rie are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the ngp80-rie are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the ngp80-rie are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the ngp80-rie are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the ngp80-rie is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Oxford NGP80 RIE SOP - Equipment - nanoFAB Confluenceconfluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
  2. [2]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
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Last updated Aug 13, 2026.

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