Oxford Instruments

Plasmalab 80 Plus RIE-PECVD

Etch Oxford Instruments Plasmalab 80 family

Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Plasmalab 80 Plus RIE-PECVD — Inventory photo — Fig. 01Plasmalab 80 Plus RIE-PECVDInventory photo^[1]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

It has some problems.
It was set up with a PC interface and appears to have lost signals for RF power.
Pressure and chamber switch were erratic.

What do the numbers mean?

Power & electrical2

It has some problems. It was setup with PC interface and it appears to have lost signals for RF power, pressure and chamber switch was erratic.^[1]

Accurate?

ENI Power Supply upgraded to MKS^[1]

Accurate?

Configuration & options1

Dual Chamber (Chamber A: PECVD & Chamber B: RIE)^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationIt has some problems. It was setup with PC interface and it appears to have lost signals for RF power, pressure and chamber switch was erratic.^[1]
ConfigurationENI Power Supply upgraded to MKS^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Plasmalab 80 Plus RIE-PECVD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Plasmalab 80 Plus RIE-PECVD are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Plasmalab 80 Plus RIE-PECVD are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Plasmalab 80 Plus RIE-PECVD are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Plasmalab 80 Plus RIE-PECVD is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Plasmalab 80 Plus RIE-PECVD are on record.
Answerable by: an OEM parts catalog or a service engineer