Panasonic
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A profilometer is a metrology and inspection tool used to measure surface topography and profile features on processed substrates. Profilometers in semiconductor and microfabrication work are used to characterize height, step structure, surface form, and other three dimensional geometric results of prior process steps.
A profilometer measures the shape of a surface by collecting topographic information across an area or along a trace and converting that information into a height profile or a three dimensional surface map. Profilometers in this class are used to inspect formed structures and quantify differences in elevation created by deposition, etch, patterning, planarization, or bonding related processes.
Metrology and inspection tools of this class are used after a fabrication step has created a surface or structural feature that needs dimensional verification. Profilometer measurements commonly feed process control by checking whether a prior operation produced the intended surface geometry before the substrate moves to the next manufacturing stage.
Profilometers are used for surface topography evaluation, step height checking, and inspection of patterned or structured surfaces in semiconductor and related precision manufacturing. Profilometers of this type are applied where engineers need nonvisual dimensional information about surface relief rather than only planar imaging.
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The Panasonic UA 3 P 4 is an ultra high accurate 3D profilometer.[1]
The following facts about the UA 3 P 4 Ultra High Accurate 3D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UA 3 P 4 Ultra High Accurate 3D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the UA 3 P 4 Ultra High Accurate 3D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the UA 3 P 4 Ultra High Accurate 3D are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the UA 3 P 4 Ultra High Accurate 3D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the UA 3 P 4 Ultra High Accurate 3D are on record.
Answerable by: an OEM parts catalog or a service engineer
Last updated Oct 20, 2026.
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.