Waferpedia

Pfeiffer

HiPace300

100mmPfeiffer HiPace300 family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

PfeifferHiPace300
No photo available yet
  • Plate 01Pfeiffer Vacuum HiPace 300 Plus PM P03 989, DN 100 CF Turbo Pump w TC 110

    MyCybermarketsWatch on YouTube
  • Plate 02Pfeiffer Hipace 300 starting

    Михаил ЗарубинWatch on YouTube
  • Plate 03PFEIFFER HiPace300 Turbomolecular Pump #pfeiffer #pump #machine

    Vacuum ProductWatch on YouTube

Wafer size

100mm

Vacuum

Turbo pump[1]

What is it?

The source lists the Pfeiffer HiPace300 as the loadlock secondary turbo pump in an evaporator system dedicated to coating conductive layers for non-conductive samples. No additional model-specific details are stated beyond its use within that system.

What can it run?

Process applications and technology nodes documented for this tool.

  • Used as a loadlock secondary turbo pump in an evaporator system

What do the numbers mean?

Vacuum & pumping2

Pump type
Turbo pump[1]
Accurate?
Application context
Loadlock secondary pump in the EVA 451 evaporator system[1]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Pump typeTurbo pump[1]
  • Application contextLoadlock secondary pump in the EVA 451 evaporator system[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the HiPace300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the HiPace300 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HiPace300 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the HiPace300 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the HiPace300 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the HiPace300 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.chepfl.ch
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →