Plasma-Therm
790 RIE-PECVD
Power
13.56 MHz RF package[3]
Vacuum
Turbo pump (10-5 Torr)[2]
Gas delivery
O2 (20sccm), CF4 (50 sccm), He (100sccm)[2]
What is it?
What do the numbers mean?
Power & electrical2
- 13.56 MHz RF package[3]
Vacuum & pumping6
Gas & chemistry2
Optics & imaging1
- Compatible Materials
- Si (to etch with Cr mask, use the ORANGE RIE batchtop), TMDs, and Graphene[2]
Control & software2
Configuration & options11
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationO2 (20sccm), CF4 (50 sccm), He (100sccm)[2]
- ConfigurationTurbo pump (10-5 Torr)[2]
- Configuration6 process gases[3]
- Configuration13.56 MHz RF package[3]
- Configuration360lps turbo pump[3]
- Voltage208V, 3 Phase[4]
- ConfigurationNeslab Thermo Flex 2500 chiller and Ruvac pump system[4]
- Configuration(1) RUVAC WSU 501 Vacuum Pump[5]
- Configuration(1) Leybold Trivac D40BCS Vacuum Pump[5]
- ConfigurationWith Controls & RUVAC W3U 501H Vacuum Pump[6]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 790 RIE-PECVD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 790 RIE-PECVD are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 790 RIE-PECVD are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 790 RIE-PECVD are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 790 RIE-PECVD are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 790 RIE-PECVD is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]inventory listing
- [6]inventory listing
- [7]inventory listing
Last updated Jul 29, 2026.