PVA TePla
GigaBatch
Plate 01PVATepla GIGABatch 360M O2 PLASMA power on DV
瀚柏科技 CO., LTDWatch on YouTubePlate 02穎強科技-PVA TePla 微波電漿清洗機 GIGAbatch 360 380P 介紹
Afen LiuWatch on YouTube
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Photo resist stripping
- Wafer surface cleaning before subsequent processes
- Descumming before wet etching
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Gold must not be loaded in the tool, even if covered and protected.
- Ag, Cu, Cr, and Fe are not welcome in the tool.
- Materials that deteriorate easily upon exposure to oxygen should not be processed in the machine.
What do the numbers mean?
Vacuum & pumping2
Wafer handling2
Gas & chemistry1
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the GigaBatch are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GigaBatch are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the GigaBatch are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the GigaBatch are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the GigaBatch is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the GigaBatch are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
Last updated Jul 29, 2026.
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