Rigaku
MiniFlex
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Rigaku MiniFlex is an X-ray diffraction (XRD) analytical measuring instrument produced by Rigaku. The Rigaku MiniFlex was the first commercial benchtop (tabletop) X-ray diffraction instrument. The Rigaku MiniFlex 600 is a compact benchtop x-ray diffraction system with capabilities including identification of crystalline phases, crystallinity, crystallite size, and crystal structure determination.[1][2]
What it is
The Rigaku MiniFlex is an X-ray diffraction analytical measuring instrument. The Rigaku MiniFlex is a benchtop X-ray diffraction instrument. The Miniflex line was introduced in 1973. The current instrument is the fourth in the series.[1]
How it works
The original MiniFlex and its successor employed a horizontal goniometer with data output from an internal strip chart recorder. The MiniFlex+ employed a vertical goniometer. The MiniFlex II offered a monochromatic X-ray source and a 1D silicon strip detector. The later MiniFlex generation introduced in 2017 incorporated a 2D hybrid pixel array detector and an 8-position automatic sample changer.[1]
The MiniFlex 600 is equipped with an automated 6 position sample changer with sample spinning capability. The MiniFlex 600 supports identification of crystalline phases, crystallinity, crystallite size, and crystal structure determination.[2]
Where it fits in the process flow
General reference — not yet source-verifiedX-ray diffraction sits in the characterization and failure-analysis portion of a process flow rather than in the main patterning or deposition path. X-ray diffraction is typically used after material formation steps such as deposition, growth, annealing, reaction, or powder preparation. X-ray diffraction results can guide subsequent process tuning, materials selection, or confirmatory analysis by complementary metrology methods.
Applications
The MiniFlex 600 can be used for identification of crystalline phases, crystallinity, crystallite size, and crystal structure determination.[2]
What do the numbers mean?
Power & electrical2
Optics & imaging3
Control & software3
- Comes with PC, Chiller, Cables and single sample holder[3]
- Software (6th generation)
- Updated SmartLab Studio II software with fundamental parameter method (FP), phase identification using the Crystallography Open Database (COD), and a wizard for ab initio crystal structure analysis[1]
Configuration & options19
Vintage & configurations
- 1973Production start[1]
The original Miniflex was introduced in 1973.
- 1973Original MiniFlex introduced[1]
First commercial benchtop X-ray diffraction instrument introduced
- 19762nd generation MiniFlex introduced[1]
Second generation MiniFlex introduced
- 1995MiniFlex+ (3rd gen) introduced[1]
Third generation MiniFlex+ with 450W power and computer control
- 2006MiniFlex II introduced[1]
Fourth generation with monochromatic X-ray source and 1D silicon strip detector
- 2012MiniFlex600 introduced[1]
Fifth generation with 600W tube power and PDXL software
- 20176th generation MiniFlex introduced[1]
Sixth generation with 2D HPAD detector and 8-position sample changer
- 20176th generation introduction[1]
6th generation MiniFlex was introduced in 2017.
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Miniflex | original | 1973 | — | en.wikipedia.org[1] |
| MiniFlex II | — | 2006 | Introduced a monochromatic X-ray source and a 1D silicon strip detector. | en.wikipedia.org[1] |
| MiniFlex600 | 5th generation | 2012 | Built upon the line with 600 W tube power and PDXL powder diffraction software. | en.wikipedia.org[1] |
| Original Miniflex | 1st generation | 1973 | About one-tenth the size and dramatically less expensive than conventional X-ray diffraction equipment of the period; employed a horizontal goniometer with data output provided by an internal strip chart recorder | en.wikipedia.org[1] |
| 2nd Generation Miniflex | 2nd generation | 1976 | Employed a horizontal goniometer with data output provided by an internal strip chart recorder | en.wikipedia.org[1] |
| 6th generation MiniFlex | 6th generation | 2017 | Incorporated a 2D hybrid pixel array detector (HPAD) and an 8-position automatic sample changer; updated SmartLab Studio II software with fundamental parameter method (FP), phase identification using the Crystallography Open Database (COD), and a wizard for ab initio crystal structure analysis | en.wikipedia.org[1] |
| MiniFlex (original) | 1st generation | 1973 | First commercial benchtop X-ray diffraction instrument; horizontal goniometer with strip chart recorder | en.wikipedia.org[1] |
| MiniFlex (2nd generation) | 2nd generation | 1976 | Horizontal goniometer with strip chart recorder | en.wikipedia.org[1] |
| MiniFlex (6th generation) | 6th generation | 2017 | 2D hybrid pixel array detector (HPAD); 8-position automatic sample changer; SmartLab Studio II software with fundamental parameter method | en.wikipedia.org[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of instrument is the Rigaku MiniFlex?
The Rigaku MiniFlex is an X-ray diffraction analytical measuring instrument.[1]
Is the Rigaku MiniFlex a benchtop system?
The Rigaku MiniFlex is a benchtop X-ray diffraction instrument.[1]
Does the MiniFlex 600 have automatic sample handling?
The MiniFlex 600 is equipped with an automated 6 position sample changer with sample spinning capability.[2]
Not publicly documented
The following facts about the MiniFlex are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the MiniFlex are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MiniFlex are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MiniFlex is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MiniFlex are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the MiniFlex are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]en.wikipedia.org — en.wikipedia.orgen.wikipedia.org
- [2]tmi.utexas.edu — tmi.utexas.edutmi.utexas.edu
- [3]Inventory photo
- [4]Inventory photo
- [5]Equipment inventory listing
- [6]Equipment inventory listing
Last updated Oct 15, 2026.
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