Waferpedia

Rigaku

Ultima III

Ultima III — Inventory photo
Fig. 01Ultima IIIInventory photo[1]

What is it?

The Rigaku Ultima III is a diffractometer configured with a high-speed silicon strip detector, automatic sample exchange, X-ray generator, multiple detector and optics options, and a five-axis high-precision goniometer.

What do the numbers mean?

Power & electrical2

1.2kW Cu Ka X-ray generator
λ = 1.5405 Å[1]
Accurate?
X-ray generator ranges
20 kV to 30 kV; 2 mA to 40 mA[1]
Accurate?

Optics & imaging3

1D D/teX Ultra high-speed silicon strip detector[1]
Accurate?
Detectors
Scintillation point detector and  a high-speed position sensitive detector system Dtex Ultra[1]
Accurate?
Optics
Bragg Brentano parafocusing optics and parallel beam optics with a parabolic X-ray mirror[1]
Accurate?

Performance1

Stage
Five axes high precision goniometer, fixed standard stage, and thin-film stage[1]
Accurate?

Control & software1

A complete set of database and analysis software is available on both the Ultima III operation PC and workstation PC[1]
Accurate?

Configuration & options3

Automatic sample exchanger (ASC-10)[1]
Accurate?
Auto Sample Exchanger
ACS-10[1]
Accurate?
Monochromator
Ge (220) 2-bounce incident beam monochromator and graphite diffraction beam monochromator[1]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • 1.2kW Cu Ka X-ray generatorλ = 1.5405 Å[1]
  • X-ray generator ranges20 kV to 30 kV; 2 mA to 40 mA[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Ultima III are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Ultima III are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Ultima III are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Ultima III are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Ultima III are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Ultima III is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →