SCREEN
SU 3200
What is it?
Why won't it start?
Documented failure modes, common issues, and field considerations.
- CC1 & CC3 circulation pumps are not functioning.
- MPOC6 multi-nozzle 1-1 has flow rate below lower limit and temperature control stopped.
What do the numbers mean?
Vacuum & pumping1
- CC1 & CC3 Circulation Pumps – NG (not functioning)[1]
Gas & chemistry1
- Chemicals Used: - H3PO4 (Phosphoric Acid) - IPA (Isopropyl Alcohol) - H2O2 (Hydrogen Peroxide) - TM-Y Chemical Tanks / Channels: - 12 channels FOUP Ports: - 4[1]
Control & software1
- MPOC6 Multi-Nozzle 1-1 – Flow rate below lower limit; temperature control stopped[1]
Configuration & options1
- No HDD[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the SU 3200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 3200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SU 3200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SU 3200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the SU 3200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SU 3200 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Jul 29, 2026.
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