SCREEN

WS 820 L

SCREEN WS 820 L family

Research Quality: 30% complete

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WS 820 L — Inventory photo — Fig. 01WS 820 LInventory photo^[1]

Power

3 Phase, 208V, 170a, 100V^[1]

Vacuum

H 3 PO 4 DIW Spiking Pump^[1]

Gas delivery

H3PO4 , IPA , HF^[1]

What is it?

The SCREEN / DNS WS 820 L is an 8-inch wet station.

What do the numbers mean?

Power & electrical1

Phase: 3 Phase, 208V, 170a, 100V^[1]

Vacuum & pumping1

H 3 PO 4 DIW Spiking Pump^[1]

Accurate?

Wafer handling6

Rear type transfer flow^[1]
PLC (Loader / Unloader): Mitsubishi A3A CPU P21^[1]
Olifra: wafer flatzone^[1]; Front carrier detector sensor^[1]; 2 carrier loading (stocker 8 carrier loading^[1]; Robot:^[1]

Gas & chemistry1

Chemical: H3PO4 , IPA , HF^[1]

Control & software1

Main PC: Mitsubishi/LM (hard disket OK)^[1]

Configuration & options10

SiN Wet Etching^[1]; Process for Nitride Strip^[1]; IPA dryer fire extinguisher^[1]
Signal Tower: 3 color (GYR) Patlite lamp type^[1]
Left/ Right Stepping Motor (Oriental: VEXTA A 6259)^[1]
Up/Down Stepping Motor (Oriental: VEXTA PK 596 H^[1]; Measuring Unit:^[1]; H3PO4 Measuring Tank^[1]; DIW Measuring Tank^[1]; HF Measuring Tank^[1]

Vintage & configurations

1996Vintage^[2]
Described as a 1996 vintage unit.
1997Vintage^[1]
Described as a 1997 vintage unit.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ChemicalH3PO4 , IPA , HF^[1]
Phase3 Phase, 208V, 170a, 100V^[1]
ConfigurationH 3 PO 4 DIW Spiking Pump^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the WS 820 L are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the WS 820 L are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the WS 820 L are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the WS 820 L are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the WS 820 L is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the WS 820 L are on record.
Answerable by: an OEM parts catalog or a service engineer