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Semitool

ST 2700 Dual Stack Spin Rinse

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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Semitool ST 2700 Dual Stack Spin Rinse Dryer (SRD) is a dual-stack spin rinse dryer. The Semitool ST 2700 SRD has an upper unit dedicated to 100mm (4") substrates. The Semitool ST 2700 SRD has a lower unit dedicated to 150mm (6") substrates.[1][2]

ST 2700 Dual Stack Spin Rinse — Inventory photo
Fig. 01ST 2700 Dual Stack Spin RinseInventory photo[1]

What it is

The Semitool ST 2700 Dual Stack Spin Rinse Dryer is configured as a dual-unit system with an upper SRD unit and a lower SRD unit.[2]

How it works

The ST 2700 uses nitrogen control on the top of the upper unit and a main control compartment below the bottom unit.[2]

The ST 2700 uses a Teflon cassette inside the chamber and a chamber lid during processing.[2]

Where it fits in the process flow

The ST 2700 accommodates 100 mm substrates in the upper unit and 150 mm substrates in the lower unit.[2]

Applications

The ST 2700 is used with wafer cassettes loaded into the chamber for rinse and dry processing.[2]

What do the numbers mean?

Wafer handling2

Upper unit substrate size
100mm (4")[2]
Accurate?
Lower unit substrate size
150mm (6")[2]
Accurate?

Configuration & options4

Tool type
Dual Stack Spin Rinse Dryer (SRD)[1]
Accurate?
Rinse RPM
around 600[2]
Accurate?
Dry RPM
1200[2]
Accurate?
Minimum recommended dry time
240s[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the ST 2700 Dual Stack Spin Rinse are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ST 2700 Dual Stack Spin Rinse are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the ST 2700 Dual Stack Spin Rinse are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the ST 2700 Dual Stack Spin Rinse are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the ST 2700 Dual Stack Spin Rinse are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the ST 2700 Dual Stack Spin Rinse is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]cores.arizona.edu — cores.arizona.educores.arizona.edu
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Last updated Oct 12, 2026.

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