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SPTS

c2L

Operation and Maintenance200mmSPTS c2L family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

SPTSc2L
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What it is

General reference — not yet source-verified

Deep reactive ion etchers are plasma process tools used to anisotropically remove silicon in patterned areas. Deep reactive ion etchers are used after lithographic patterning to transfer mask-defined features into the wafer.

How it works

The NIST process flow used the SPTS Omega c2L Rapier for the DRIE step after photolithography on a silicon wafer. The patterned chips were then bonded to a blank chip after the wafer was diced.[2]

Where it fits in the process flow

In the NIST manufacturing sequence, lithography was implemented on a silicon wafer and followed by a DRIE process on the SPTS Omega c2L Rapier. In the same sequence, the wafer was diced to smaller chips and the patterned chips were bonded to a blank chip after etching.[2]

Applications

The NIST study used the SPTS Omega c2L Rapier to generate controlled flaws by deep reactive ion etching after stepper lithography. The study produced holes with various shapes and distribution patterns and used a chip bonding method to convert manufactured holes into internal pores.[2]

What do the numbers mean?

Wafer handling1

Wafer size
200mm[1]
Accurate?

Configuration & options5

Training course type
Operation and Maintenance[1]
Accurate?
Advanced course
Set-up & Repair[1]
Accurate?
Training category
Operation and Maintenance[1]
Accurate?
Tool designation
Omega c2L Rapier deep silicon etcher[2]
Accurate?
Process use
DRIE process[2]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Omega c2L Rapier———doi.org[2]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of training was offered for the SPTS c2L?

SPTS offered Operation and Maintenance training for the 200mm c2L Monarch and also offered a c2L Set-up & Repair course.[1]

Was the c2L used for deep reactive ion etching in the NIST fabrication flow?

The NIST fabrication flow used an SPTS Omega c2L Rapier deep silicon etcher for the DRIE process.[2]

Not publicly documented

The following facts about the c2L are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the c2L are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the c2L are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the c2L are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the c2L is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the c2L are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]doi.org — doi.orgdoi.org
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Last updated Oct 17, 2026.