STS
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The STS AOE Pro is an inductively coupled plasma (ICP) etcher manufactured by STS (Surface Technology Systems).[1]
An ICP etcher generates a high-density plasma by applying radio-frequency power to a coil or antenna around the process chamber, creating a strong electromagnetic field that ionizes the process gas.
A separate RF bias applied to the wafer chuck accelerates ions toward the wafer surface, enabling directional etching with controlled ion energy and minimal sidewall damage.
ICP etchers are typically used in the front-end-of-line and back-end-of-line process flows after photolithography to define patterns in the underlying substrate or thin films.
Downstream processes include resist stripping and wet cleaning, while upstream steps involve mask deposition and patterning.
ICP etching is applied to a wide range of materials including silicon, silicon dioxide, silicon nitride, and various metals for applications such as trench isolation, gate etching, and contact hole formation.
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The following facts about the AOE Pro ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No specifications for the AOE Pro ICP are on record.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AOE Pro ICP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AOE Pro ICP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AOE Pro ICP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AOE Pro ICP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Last updated Aug 20, 2026.