SUSS MicroTec

MA 150 E Mask

Lithography Wafer Thickness Measurement SUSS MicroTec MA 150 family

Research Quality: 30% complete

LinkedIn X Email

MA 150 E Mask — Inventory photo — Fig. 01MA 150 E MaskInventory photo^[1]

Wafer size

Wafer Thickness Measurement

Power

1000 Watt Lamphouse^[4]

Vacuum

Configured to fit customer requirements^[4]

Performance

Topside Alignment (TSA)^[4]

Optics

Automatic Mask Aligner^[4]

What is it?

The SUSS MA 150 E Mask Aligner is a 6-inch mask aligner configured with wafer thickness measurement and related alignment accessories.

What do the numbers mean?

Power & electrical2

Lamphouse: 1000 Watt Lamphouse^[4]
Power Supply: CIC1200^[4]

Vacuum & pumping2

Vacuum Chuck: Configured to fit customer requirements^[4]; Capable of Hard, Soft, Proximity, and Vacuum Contact Exposure Modes (with appropriate tooling)^[4]

Wafer handling4

Wafer size: Wafer Thickness Measurement^[1]; Temperature Chuck^[1]; Cassette to cassette operation^[4]; Cognex 8100 Pattern Recognition Software for automatic alignment of the mask to substrate patterns.^[4]

Optics & imaging4

Automatic Mask Aligner^[4]
Exposure Optics: UV400 Optics (365nm/405nm exposure)^[4]
Single Objective: Configured to fit customer requirement (5x, 10x, or 20x)^[4]
Maskholder: Configured to fit customer requirements^[4]

Performance3

Topside Alignment (TSA)^[4]

Accurate?

AL3000 Automatic Alignment^[4]

Accurate?

Capable of aligning patterns of nearly any shape or design with alignment accuracies of less than 1.0µm^[4]

Accurate?

Control & software1

Operating System: Windows 2000^[4]

Configuration & options8

Gen 2^[1]; Equipped with:^[1]; NCGS^[1]; DMC Reader^[1]; Can be used in either Automatic or Manual Mode^[4]
Prealigner Type: XRS^[4]; Auto Align option installed^[4]
Microscope: DVM6 Microscope^[4]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Lamphouse1000 Watt Lamphouse^[4]
Power SupplyCIC1200^[4]
Vacuum ChuckConfigured to fit customer requirements^[4]
ConfigurationCapable of Hard, Soft, Proximity, and Vacuum Contact Exposure Modes (with appropriate tooling)^[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the MA 150 E Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA 150 E Mask are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MA 150 E Mask are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MA 150 E Mask are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MA 150 E Mask are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MA 150 E Mask is not on record.
Answerable by: an OEM datasheet or a fab qualification report