SUSS MicroTec

MS 100

Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What is it?

SUSS MicroTec MS 100 is a tool model identified in a SUSS MicroTec MS 100 family entry.

What do the numbers mean?

Configuration & options16

Refurbished^[1]
Make: SUSS^[1]
Model: MS 100^[1]
Service/product navigation entry: MS100-MA^[2]2 sources
Lithography product family entry: MA100/150e Gen2^[2]2 sources
Product line listing: MS100-MA^[2]2 sources
OEM: SUSS MicroTec^[3]
Asset number: 135915^[3]
Last confirm date: July 08, 2025^[1]
Refurbished: Refurbished^[1]
Listing status: Refurbished^[3]
Manufacturer: SUSS MicroTec^[3]
Asset #: 135915^[3]
Related product-line entry: MS100-MA^[2]2 sources
Listing condition: Refurbished^[3]
Condition: Refurbished^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the model name?

The model name is MS 100.^[1]^[3]^[4]

Who is the manufacturer?

The manufacturer is SUSS MicroTec.^[3]

Not publicly documented

The following facts about the MS 100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MS 100 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MS 100 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MS 100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MS 100 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the MS 100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report