Tegal

i90X

Etch Tegal i90X family

Research Quality: 40% complete

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i90X — web.archive.org — Fig. 01i90Xweb.archive.org^[1]

Optics

high-resolution stepper motors^[1]

Control era

Windows NT

What is it?

The i90X is presented as Tegal's next generation in plasma etch technology, with emphasis on repeatability, uniformity, productivity, and no increase in footprint versus the 900 series platform. The source also describes it as a production-proven, workhorse system with features for recipe control, data logging, user interface enhancements, and PC-based control.

What can it run?

Process applications and technology nodes documented for this tool.

silicon
telecom

What do the numbers mean?

Power & electrical2

Set-point control: 20X fine set-point control for pressure, RF and gas flows^[1]
Control computer: Windows NT, Pentium II 130MB RAM, 230 MHz clock, 6GB hard drive available^[1]

Wafer handling1

User interface: GUI touch screen human interface; on-screen end-point trace; I/O screen read-out; on-screen alarm logging; lot and wafer ID^[1]

Optics & imaging1

Stepper motors: high-resolution stepper motors^[1]

Control & software4

Recipes: unlimited recipes^[1]
Recipe editor: easy to use screen recipe editor^[1]
Control system: programmed logic controller (PLC) for input/output speed and expansion; interface board connects to all existing sensors for troubleshooting and maintenance^[1]
Integrated PC: industrial strength integrated PC/touchscreen^[1]

Dimensions & facilities1

Footprint: no increase in footprint^[1]

Configuration & options8

Technology: plasma etch technology^[1]
Platform: based on the robust, production-proven platform of the 900 series^[1]
Stabilization step: configurable, faster stabilization step^[1]
Overetch step: programmable percent overetch step^[1]
Transport: improved, smooth, faster transport^[1]
Motor drivers: intelligent micro-stepping motor drivers^[1]
Data logging: default or user-defined values and polling rates; downloadable files to disk or CD; on-screen real time and historical trending; unlimited access to every system I/O data point; additional I/O available for expansion^[1]
Removable media: read-write CD and 3.5 floppy disk^[1]

Vintage & configurations

Control-system eraWindows NT^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Set-point control20X fine set-point control for pressure, RF and gas flows^[1]
Control computerWindows NT, Pentium II 130MB RAM, 230 MHz clock, 6GB hard drive available^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the i90X are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the i90X are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the i90X are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
No publicly documented failure modes or field errata for the i90X are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the i90X is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the i90X are on record.
Answerable by: an OEM parts catalog or a service engineer