Thermo Fisher

Scientific FEI Nova NanoSEM 450

Metrology & Inspection Thermo Fisher Scientific FEI Nova NanoSEM family

Research Quality: 50% complete

The Thermo Fisher Scientific / FEI Nova NanoSEM 450 is a scanning electron microscope. The Thermo Fisher Scientific / FEI Nova NanoSEM 450 has 1-30 kV operation. The Thermo Fisher Scientific / FEI Nova NanoSEM 450 includes beam deceleration capabilities.^[1]

Scientific FEI Nova NanoSEM 450 — Inventory photo — Fig. 01Scientific FEI Nova NanoSEM 450Inventory photo^[2]

Power

1-30 kV^[1]

Vacuum

Cold finger for improved vacuum levels^[1]

Optics

Immersion lens^[1]

What it is

The Thermo Fisher Scientific FEI Nova NanoSEM 450 is a scanning electron microscope used for metrology and inspection.^[2]^[1]

How it works

The Nova NanoSEM 450 supports an accelerating voltage range of 1 to 30 kV, and the lower end can reach 50 volts when beam deceleration is used.^[1]

The Nova NanoSEM 450 uses an immersion lens and beam deceleration capabilities.^[1]

Where it fits in the process flow

The Nova NanoSEM 450 can support electron-beam lithography attachments through an external fast beam blanker.^[1]

Applications

The Nova NanoSEM 450 includes an Everhart-Thornley detector, a through-lens detector, a retractable concentric backscatter detector, a low-vacuum helix detector, and a special low-vacuum detector.^[1]

What do the numbers mean?

Power & electrical4

1-30 kV (500 volts possible); 50 volts possible using beam deceleration^[1]
Accelerating voltage: 1-30 kV; 500 volts possible; 50 volts possible using beam deceleration^[1]
Operating voltage: 1-30 kV^[1]
Low-voltage operation: 50 volts possible using beam deceleration^[1]

Vacuum & pumping8

Cold finger for improved vacuum levels^[1]; Edwards nXDS10i scroll pump and turbomolecular pump^[1]; Low-vacuum helix detector^[1]
Cold finger: Present (for improved vacuum levels)^[1]
Pumps: Edwards nXDS10i scroll pump and turbomolecular pump^[1]
Detectors: Everhart-Thornley detector, through-lens detector, retractable concentric backscatter detector, low-vacuum helix detector, special low vacuum detector^[1]
Cold finger: Included for improved vacuum levels^[1]
Vacuum pump: Edwards nXDS10i scroll pump and turbomolecular pump^[1]

Wafer handling3

Quick Loader and accompanying sample sledges^[1]
Sample loader: Quick Loader with accompanying sample sledges^[1]
Quick Loader: Included with accompanying sample sledges^[1]

Optics & imaging11

Immersion lens^[1]; NavCam (navigation camera) and infrared CCD camera^[1]; Detectors:^[1]; Everhart-Thornley detector^[1]; Through-lens detector^[1]; Retractable concentric backscatter detector^[1]
Immersion lens: Present^[1]
Navigation camera: NavCam and infrared CCD camera^[1]
Immersion lens: Included^[1]
Navigation camera: NavCam^[1]
Infrared camera: Infrared CCD camera^[1]

Control & software8

Manual User Interface (knob set) (no joystick)^[1]; xT microscope Control Software, running on Windows XP (including computer, mouse, keyboard, monitor, and table)^[1]
User interface: Manual User Interface (knob set), no joystick^[1]
Control software: xT microscope Control Software, running on Windows XP^[1]
Manual user interface: Knob set; no joystick^[1]
Control software: xT microscope Control Software^[1]
Operating system: Windows XP^[1]
Computer bundle: Computer, mouse, keyboard, monitor, and table included^[1]

Configuration & options24

Plasma cleaner^[1]; Stage:^[1]; 110 mm x 110 mm stage navigation^[1]
Tilt: -15 to 54 degrees^[1]; Eucentric position, working distance at 5 mm^[1]
Z-range: 0-25 mm^[1]; Haskris water chiller^[1]
Plasma cleaner: Present^[1]
Stage navigation range: 110 mm x 110 mm^[1]
Tilt range: -15 to 54 degrees^[1]
Eucentric position: Present, working distance at 5 mm^[1]
Chiller: Haskris water chiller^[1]
Beam deceleration: Present^[1]
External fast beam blanker: Compatible with electron-beam lithography attachments^[1]
Vintage: 2012^[1]
OEM: Thermo Fisher Scientific / FEI^[2]
Model: Nova NanoSEM 450^[2]
Equipment type: Scanning Electron Microscope (SEM)^[2]
Plasma cleaner: Included^[1]
Stage navigation: 110 mm x 110 mm^[1]
Stage tilt: -15 to 54 degrees^[1]
Eucentric position: Working distance at 5 mm^[1]
Water chiller: Haskris water chiller^[1]
Beam blanker: External fast beam blanker compatible with electron-beam lithography attachments^[1]

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Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration1-30 kV (500 volts possible); 50 volts possible using beam deceleration^[1]
ConfigurationCold finger for improved vacuum levels^[1]
ConfigurationEdwards nXDS10i scroll pump and turbomolecular pump^[1]
ConfigurationLow-vacuum helix detector^[1]
Accelerating voltage1-30 kV; 500 volts possible; 50 volts possible using beam deceleration^[1]
Cold fingerPresent (for improved vacuum levels)^[1]
PumpsEdwards nXDS10i scroll pump and turbomolecular pump^[1]
DetectorsEverhart-Thornley detector, through-lens detector, retractable concentric backscatter detector, low-vacuum helix detector, special low vacuum detector^[1]
Operating voltage1-30 kV^[1]
Low-voltage operation50 volts possible using beam deceleration^[1]
Cold fingerIncluded for improved vacuum levels^[1]
Vacuum pumpEdwards nXDS10i scroll pump and turbomolecular pump^[1]

Where are the manuals?

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Not publicly documented

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Frequently asked questions

What type of equipment is the FEI Nova NanoSEM 450?

The FEI Nova NanoSEM 450 is a scanning electron microscope.^[2]^[1]

Not publicly documented

The following facts about the Scientific FEI Nova NanoSEM 450 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Nova NanoSEM 450 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Nova NanoSEM 450 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scientific FEI Nova NanoSEM 450 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scientific FEI Nova NanoSEM 450 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scientific FEI Nova NanoSEM 450 is not on record.
Answerable by: an OEM datasheet or a fab qualification report