Waferpedia

Thermo Fisher

Scientific FEI Verios 460 L

Thermo Fisher logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Vacuum

CryoCleaner[1]

Optics

Elstar electron Column with UC Technology[1]

What is it?

The Thermo Fisher Scientific / FEI Verios 460 L is an inspection/metrology instrument with a 100 x 100 mm stage and listed imaging, detection, cleaning, and pumping features.

What do the numbers mean?

Vacuum & pumping2

CryoCleaner[1]
Accurate?
Cryo Cleaner Spare Vessel[1]
Accurate?

Wafer handling1

Automatic Loadlock with 2 Universal Shuttles (with Multi-stub Inserts)[1]
Accurate?

Optics & imaging5

Elstar electron Column with UC Technology[1]
Accurate?
CCD IR Inspection Camera[1]
Accurate?
Beam Detector[1]
Accurate?
Through-lens Detection (TLD) for SE and BSE[1]
Accurate?
Retractable DBS Detector[1]
Accurate?

Control & software4

xT Software Version 5.x[1]
Accurate?
Support PC with Windows 7[1]
Accurate?
Software Driven Switchbox[1]
Accurate?
Manual User Interface with Joystick[1]
Accurate?

Configuration & options8

100 x 100 mm[1]
Accurate?
5-Axes Motorized[1]
Accurate?
Eccentric Stage[1]
Accurate?
Workstation with Windows XP[1]
Accurate?
2 x 24" Wide Screen LCD Monitor[1]
Accurate?
Two Cross-sectional Holders with Table Stand[1]
Accurate?
Everhart-Thomley SED[1]
Accurate?
E-Beam Current Measurement[1]
Accurate?
Interested in this tool?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationCryoCleaner[1]
  • ConfigurationCryo Cleaner Spare Vessel[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Scientific FEI Verios 460 L are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Verios 460 L are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Verios 460 L are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Scientific FEI Verios 460 L are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Scientific FEI Verios 460 L are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Scientific FEI Verios 460 L is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
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Last updated Jul 29, 2026.

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