Ulvac

NE-550

Research Quality: 40% complete

Plate 01Model：NE-550 高密度プラズマエッチング装置 - 研究開発向けの最適なソリューション
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What is it?

The sources identify the Ulvac NE-550 as an etching tool in UCLA Nanolab's equipment list and describe it as a multipurpose high-density, low-pressure plasma etching system with good uniformity and repeatability. It is stated to be capable of etching III-V materials, metals, ceramics, and optical materials.

What can it run?

Process applications and technology nodes documented for this tool.

Chlorine etching
Etching III-V materials
Etching metals
Etching ceramics
Etching optical materials

What do the numbers mean?

Vacuum & pumping1

System type: Multipurpose high-density, low-pressure plasma etching system^[2]

Optics & imaging1

Materials etched: III-V, metals, ceramics, and optical materials^[2]

Performance1

Performance note: Good uniformity and repeatability^[2]

Configuration & options1

Equipment name: Ulvac NE-550 Chlorine Etcher^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

System typeMultipurpose high-density, low-pressure plasma etching system^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the NE-550 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NE-550 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NE-550 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NE-550 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NE-550 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NE-550 is not on record.
Answerable by: an OEM datasheet or a fab qualification report